Yale University Cleanroom

The University Cleanroom is a core science facility administered by the Department of Applied Physics. It is a particle-free environment for the design, fabrication, and testing of micro- and nanofabricated devices.

Research infrastructure

Yale University's Cleanroom is a pivotal facility for advanced research, equipped with more than 30 specialized tools. These tools are supported by a knowledgeable staff who ensure their maintenance and provide comprehensive training. The facility is designed to support a wide range of research fields including nano-fabrication, materials science, biomedical engineering, quantum computing, chemical and environmental engineering, and applied physics, making it an essential environment for cutting-edge investigations. 

The cleanroom's equipment and processes are organized into seven main categories: sputtering and evaporation, chemical vapor deposition, etching, lithography, metrology, back-end processing, and wet benches, along with a teaching cleanroom specifically for instructional purposes. This structured approach ensures that researchers have access to the necessary tools and support to advance their work. 

Acknowledging the cleanroom

For publications, recognition of support from the Yale University Cleanroom, as well as individual staff contributions may be formatted as follows:

• Acknowledgement: This work was made possible by the Yale University Cleanroom, a core facility supported by the Provost Office of Yale University.
• We’d like to thank [staff member] for [service or other contribution].

To share a publication on the cleanroom webpage, provide a copy to Yeongjae Shin.