Yale Cleanroom Facilities
Yong Sun & Lauren McCabe
Main Campus:
Yong Sun – 📞 203-432-8004, Becton Engineering & Applied Science Center, 5F
West Campus:
Lauren McCabe – 📞 609-902-3834, 100 Cleanroom Core Facility, 750 West Campus
Yale Cleanroom Facilities
Integrated research infrastructure for nanoscale science and engineering
As of 2025, the Yale University Cleanroom facilities at Main Campus and West Campus have been unified under a single administration. Together, they provide a particle-controlled environment supporting micro- and nanofabrication research across disciplines such as materials science, quantum computing, biomedical and chemical engineering, and environmental science. Across both sites, researchers have access to Class 1000 and Class 100 cleanroom environments, a wide range of specialized fabrication and metrology tools, and expert staff who offer equipment training and technical support.
Main Campus Cleanroom
Located in Becton Center, the Main Campus Cleanroom supports advanced micro- and nanofabrication with equipment organized into key process categories: deposition, etching, lithography, metrology, and wet processing. A dedicated Teaching Cleanroom also supports hands-on instruction. The facility is designed to accommodate diverse research needs through well-maintained infrastructure and expert technical support.

West Campus Cleanroom
Housed in Building 750, the West Campus Cleanroom includes Class 1000 wet and dry lab environments, featuring hoods for acid, base, and resist processes, as well as integrated spin coaters, hotplates, and photolithography tools. A 2020 expansion added new capabilities, including an electron beam evaporator and a reactive ion etcher. The facility is used by researchers across Yale and includes support spaces such as a gowning area, staff office, conference room, and shared workstations.

Available to Yale researchers & external researchers

Join the cleanroom
Please follow the instructions provided in the following link to access the cleanroom and research equipment.
Become a userEquipment training request
- Training Request page Please use the link above to request equipment training:
- Tool Manager summary You can also view the list of tool managers here:
Policies
Equipment policies
Precious metals
Purchase of precious metals (e.g., gold, platinum, and palladium) is the responsibility of the research group. It is not supplied by the cleanroom.
Soft cap policy
Starting FY24, the Cleanroom policy has been updated. Groups will receive an 80% discount once the group usage fee exceeds $50,000 for the Cleanroom and $20,000 for YINQE. These caps are separate, and the discounts are applied individually for each facility. The usage fee calculation will reset at the beginning of each fiscal year.
Starting FY24:
Only group soft caps will apply.
Cleanroom group cap: $50,000.
YINQE group cap: $20,000.
An 80% discount will be applied above each cap.
The usage fee calculation resets at the beginning of each fiscal year.
Before FY24:
Individual cap: $10,000.
Group cap: $100,000.
Joint YINQE/Cleanroom discount applied.
An 80% discount was applied above the cap.
The usage fee was calculated from the first use.
Operating expenses for the cleanroom are recovered through the combination of hourly charges to the user community and subsidies from Yale University. All access is tracked through the Facility Online Manager (FOM) (requires Yale network access).
Access and use policies
A detailed list of policies is included in the Cleanroom User Handbook.
New chemicals
Any user wishing to introduce chemicals to the cleanroom must first present an SDS to a staff member for evaluation and display an active knowledge of the chemical hazards. Approved chemicals may be brought into the cleanroom by staff members only.
Visitor access
Anyone not qualified to enter the cleanroom is considered a visitor. Upon the approval of cleanroom staff, a qualified cleanroom user may act as a host to bring a visitor in for the purpose of observation only.
After hours
The cleanroom operates Monday through Friday, 8 AM to 5 PM. All other times are considered after hours and are restricted to users with over thirty hours of Cleanroom time logged with no safety incidents.
External customers
An external customer is any non-Yale researcher who has obtained the approval of the School of Engineering & Applied Science Business Office.
Undergraduates
Undergraduate access is granted on a case-by-case basis and must be under the supervision of a senior researcher or instructor when working in the Cleanroom.
Discipline
Instances of user misconduct are evaluated and dealt with on a case-by-case basis. Consequences range from a warning and notice delivered to your PI, to permanent suspension of cleanroom access.
Rates
Service | Main Campus Usage Rate ($/hr) | West Campus Usage Rate ($/hr) |
---|---|---|
Cleanroom access fee | 58 | 58 |
Teaching Cleanroom access fee | 58 | - |
Staff service fee | 75 | 75 |
Oxford 80+ ICP RIE | 64 | - |
Oxford 100 ICP-RIE | 64 | 64 |
Oxford Cryo Bosch DRIE | 64 | - |
Simple PhotoMask | 275 | - |
Complex PhotoMask | 400 | - |
For metals of electron beam evaporator, gold (Au) is charged by the thickness at $2.1/nm. All other metals (Ag, Ti, Cr, Al, Ni) are free to use.
Equipment fee is covered by a cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.
(*West Campus Only) SU8 photoresists are $15/device for internal and non-profit users, $30/device for external for-profit user
External users, please contact us directly for the rates.
Cleanroom Resources
Cleanroom Seminar Series
Acknowledging the cleanroom
For publications, recognition of support from the Yale Cleanroom Facilities as well as individual staff contributions may be formatted as follows:
- Acknowledgment: This work was made possible by the West Campus Cleanroom, a core facility supported by the Office of the Provost of Yale University.
- We’d like to thank [staff member] for [service or other contribution].
To share a publication on the cleanroom web page, provide a copy to Yeongjae Shin.
Contacts
Main Campus Cleanroom: Becton Engineering and Applied Science Center, 15 Prospect Street, New Haven, CT 06511
West Campus Cleanroom: 100 Cleanroom Core Facility, 750 West Campus Dr, West Haven, CT 06516



Assistant Director, Yale University Cleanroom
Main Campus Office: 527 Becton Center
West Campus Office: 100 Cleanroom Core Facility, 750 West Campus Dr


Staff Scientist
Main Campus Office: 527 Becton Center
West Campus Office: 100 Cleanroom Core Facility, 750 West Campus Dr

Faculty Director, Main Campus Cleanroom
