Yale Cleanroom Facilities

Yong Sun & Lauren McCabe

Main Campus: 
Yong Sun – 📞 203-432-8004, Becton Engineering & Applied Science Center, 5F
West Campus: 
Lauren McCabe – 📞 609-902-3834, 100 Cleanroom Core Facility, 750 West Campus

Yale Cleanroom Facilities

Integrated research infrastructure for nanoscale science and engineering

As of 2025, the Yale University Cleanroom facilities at Main Campus and West Campus have been unified under a single administration. Together, they provide a particle-controlled environment supporting micro- and nanofabrication research across disciplines such as materials science, quantum computing, biomedical and chemical engineering, and environmental science. Across both sites, researchers have access to Class 1000 and Class 100 cleanroom environments, a wide range of specialized fabrication and metrology tools, and expert staff who offer equipment training and technical support.

Main Campus Cleanroom

Located in Becton Center, the Main Campus Cleanroom supports advanced micro- and nanofabrication with equipment organized into key process categories: deposition, etching, lithography, metrology, and wet processing. A dedicated Teaching Cleanroom also supports hands-on instruction. The facility is designed to accommodate diverse research needs through well-maintained infrastructure and expert technical support.

Cleanroom_Layout

West Campus Cleanroom

Housed in Building 750, the West Campus Cleanroom includes Class 1000 wet and dry lab environments, featuring hoods for acid, base, and resist processes, as well as integrated spin coaters, hotplates, and photolithography tools. A 2020 expansion added new capabilities, including an electron beam evaporator and a reactive ion etcher. The facility is used by researchers across Yale and includes support spaces such as a gowning area, staff office, conference room, and shared workstations.

Laboratory floor plan

Available to Yale researchers & external researchers

Join the cleanroom

Please follow the instructions provided in the following link to access the cleanroom and research equipment.

Become a user

Equipment training request

Policies

Equipment policies

Precious metals

Purchase of precious metals (e.g., gold, platinum, and palladium) is the responsibility of the research group. It is not supplied by the cleanroom.

Soft cap policy

Starting FY24, the Cleanroom policy has been updated. Groups will receive an 80% discount once the group usage fee exceeds $50,000 for the Cleanroom and $20,000 for YINQE. These caps are separate, and the discounts are applied individually for each facility. The usage fee calculation will reset at the beginning of each fiscal year.

Starting FY24:

Only group soft caps will apply.
Cleanroom group cap: $50,000.
YINQE group cap: $20,000.
An 80% discount will be applied above each cap.
The usage fee calculation resets at the beginning of each fiscal year.

Before FY24:

Individual cap: $10,000.
Group cap: $100,000.
Joint YINQE/Cleanroom discount applied.
An 80% discount was applied above the cap.
The usage fee was calculated from the first use.

Operating expenses for the cleanroom are recovered through the combination of hourly charges to the user community and subsidies from Yale University. All access is tracked through the Facility Online Manager (FOM) (requires Yale network access).

Access and use policies

A detailed list of policies is included in the Cleanroom User Handbook.

New chemicals

Any user wishing to introduce chemicals to the cleanroom must first present an SDS to a staff member for evaluation and display an active knowledge of the chemical hazards. Approved chemicals may be brought into the cleanroom by staff members only.

Visitor access

Anyone not qualified to enter the cleanroom is considered a visitor. Upon the approval of cleanroom staff, a qualified cleanroom user may act as a host to bring a visitor in for the purpose of observation only.

After hours

The cleanroom operates Monday through Friday, 8 AM to 5 PM. All other times are considered after hours and are restricted to users with over thirty hours of Cleanroom time logged with no safety incidents.

External customers

An external customer is any non-Yale researcher who has obtained the approval of the School of Engineering & Applied Science Business Office.

Undergraduates

Undergraduate access is granted on a case-by-case basis and must be under the supervision of a senior researcher or instructor when working in the Cleanroom.

Discipline

Instances of user misconduct are evaluated and dealt with on a case-by-case basis. Consequences range from a warning and notice delivered to your PI, to permanent suspension of cleanroom access.

Rates

ServiceMain Campus Usage Rate ($/hr)West Campus Usage Rate ($/hr)
Cleanroom access fee5858
Teaching Cleanroom access fee58-
Staff service fee7575
Oxford 80+ ICP RIE64-
Oxford 100 ICP-RIE6464
Oxford Cryo Bosch DRIE64-
Simple PhotoMask275-
Complex PhotoMask400-

For metals of electron beam evaporator, gold (Au) is charged by the thickness at $2.1/nm.  All other metals (Ag, Ti, Cr, Al, Ni) are free to use. 

Equipment fee is covered by a cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.

(*West Campus Only) SU8 photoresists are $15/device for internal and non-profit users, $30/device for external for-profit user

External users, please contact us directly for the rates.

Acknowledging the cleanroom

For publications, recognition of support from the Yale Cleanroom Facilities as well as individual staff contributions may be formatted as follows:

  • Acknowledgment: This work was made possible by the West Campus Cleanroom, a core facility supported by the Office of the Provost of Yale University.
  • We’d like to thank [staff member] for [service or other contribution].

To share a publication on the cleanroom web page, provide a copy to Yeongjae Shin.

Contacts

Main Campus Cleanroom: Becton Engineering and Applied Science Center, 15 Prospect Street, New Haven, CT 06511
West Campus Cleanroom: 100 Cleanroom Core Facility, 750 West Campus Dr, West Haven, CT 06516

Cleanroom_Yong Sun.jpg

Cleanroom Director

Yong Sun

Office: 527 Becton Center

Cleanroom_Luigi Frunzio

Director, Cleanroom Quantum Foundry

Luigi Frunzio
Cleanroom_Lauren McCabe

Assistant Director, Yale University Cleanroom

Lauren McCabe

Main Campus Office: 527 Becton Center
West Campus Office: 100 Cleanroom Core Facility, 750 West Campus Dr

Cleanroom_Kelly Woods

Facility Manager

Kelly Woods

Office: 529 Becton Center

Cleanroom_Yeongjae Shin

Staff Scientist

Yeongjae Shin

Office: 529 Becton Center

Cleanroom_Ida Sadeghi

Staff Scientist

Ida Sadeghi

Main Campus Office: 527 Becton Center
West Campus Office: 100 Cleanroom Core Facility, 750 West Campus Dr

Cleanroom_Peter Rakich

Faculty Director, Main Campus Cleanroom

Peter Rakich Donna L. Dubinsky Professor of Applied Physics
Cleanroom_Andre Levchenko

Faculty Director, West Campus Cleanroom

Andre Levchenko John C. Malone Professor of Biomedical Engineering