Instrument/Equipment Core/Facility: Yale University Cleanroom

Teaching cleanroom

  1. Research Cores Directory
  2. Teaching cleanroom

The teaching cleanroom is located in Becton 400.

Available to Yale researchers & external researchers

Cleanroom Staff

Hours & Location
Building:

Becton Engineering and Applied Science Center, 5th floor

About the facility

Teaching cleanroom

The Yale teaching cleanroom is located in Becton 400. Special access is required, but policies regarding hours and usage are consistent with the University Cleanroom policies. Any registered University Cleanroom members can request a Teaching Cleanroom walkthrough and access from a staff member.

  • Hood #1: For solvents and resists
  • Hood #2: For solvents and resists
  • Hood #3: For corrosives
  • HTG Aligner
  • Cooke vacuum evaporator
  • Benno evaporator
  • RIE
  • AG Assoc. rapid thermal anneal
  • Diffusion and oxidation furnaces

Join Cleanroom

Become a cleanroom member to access the tools.

Become a member

Rates

Internal rate: $58 / hour

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  3. Instrument/Equipment

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    Yong Sun

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