Yale University Cleanroom: Resources

Training materials

Cleanroom Handbook

Safety

List of Approved Chemicals (Requires CAS Login)

Yale Environmental Health and Safety

• Chemical Safety Training
• Chemical Waste Training
• Fire Safety Review

Software

LayoutEditor: A comprehensive CAD package for mask layouts. A site license is provided by Yale.

KLayout: A free, open-source CAD package for mask layouts.

CompleteEASE: Software from J.A. Woollam for use with the M2000 Ellipsometer. A workstation with this software is available inside the cleanroom.