West Campus Cleanroom
About the core
The wet bay has three process hoods for acid, base, and resist applications. They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators.
The dry bay houses analysis instrumentation and photolithography tools, including a high-resolution UV mask aligner and a non-contact optical profiler. The gowning area includes storage room for individual research groups.
In 2020, the cleanroom installed a new electron beam evaporator and reactive ion etcher.
Equipment
- Process benches
- Photoresist process bench
- Acid and base process bench
- Solvent process bench
- SUSS UV mask aligner
- UHV electron beam evaporator
- Reactive ion etcher
- Zygo 3D Optical Profiler
- Glow Research AutoGlow 200 etcher
- Westar Resist spin coater
- Olympus optical microscope
- Celestron stereo microscope
- Programmable hotplate
- Regular hotplate
- Ovens
- Refrigerator
- Secador desiccator
Lei Wang, PhD
Primary contact Research Support SpecialistBuilding 750 (Shipping & Receiving Center), with direct dedicated access along the southern exterior face of the building.
Contacts
100 Cleanroom Core Facility
750 West Campus Dr
West Haven, CT 06516
203-737-6796
203-737-2444 (wireless)
Primary contact
Director
Faculty Director
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Core/Facility
Aberration-Corrected Electron Microscopy (ACEM) Core
Our core's focus is cutting-edge and high-throughput capability in electron microscopy techniques, including TEM, SEM, and FIB.
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Core/Facility
Advanced Prototyping Center at Wright Lab
The Advanced Prototyping Center is a fabrication and design support facility to help Yale researchers with custom instrumentation.
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Core/Facility
Yale Analytical and Stable Isotope Center (YASIC)
Our analytical services include measurements of stable and radiocarbon isotopes, cations, anions, greenhouse gases, natural γ-radiation, mercury, and nutrients in water or soil extracts.