West Campus Cleanroom

The cleanroom includes 1200 square feet of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.

Core Website

Lei Wang, PhD

Primary contact Research Support Specialist
Request Services or Equipment Access
Hours & Location

Building 750 (Shipping & Receiving Center), with direct dedicated access along the southern exterior face of the building.

About the core

The wet bay has three process hoods for acid, base, and resist applications. They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators. 

The dry bay houses analysis instrumentation and photolithography tools, including a high-resolution UV mask aligner and a non-contact optical profiler. The gowning area includes storage room for individual research groups.

In 2020, the cleanroom installed a new electron beam evaporator and reactive ion etcher.


  • Process benches
    • Photoresist process bench
    • Acid and base process bench
    • Solvent process bench
  • SUSS UV mask aligner
  • UHV electron beam evaporator
  • Reactive ion etcher
  • Zygo 3D Optical Profiler
  • Glow Research AutoGlow 200 etcher
  • Westar Resist spin coater
  • Olympus optical microscope
  • Celestron stereo microscope
  • Programmable hotplate
  • Regular hotplate
  • Ovens
  • Refrigerator
  • Secador desiccator


100 Cleanroom Core Facility
750 West Campus Dr
West Haven, CT 06516


203-737-2444 (wireless)

Primary contact

Lei Wang, PhD Research Support Specialist


Min Li, PhD

Faculty Director

Andre Levchenko, EngScD John C. Malone Professor of Biomedical Engineering