West Campus Cleanroom

Lauren McCabe, PhD

Primary contact Assistant Director, Cleanroom
Building:

Building 750 (Shipping & Receiving Center); direct access along southern exterior of building

About the core

The West Campus Cleanroom is located within Building 750 (Shipping & Receiving Center) with direct dedicated access along the southern exterior face of the building. 

The existing research spaces include 1200 ft2 of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms. The wet bay has three process hoods for acid, base, and resist applications. They are equipped with standard utilities, integrated spin coaters, hotplates, and sonicators. The dry bay houses analysis instrumentation and photolithography tools including a high resolution UV mask aligner and a non-contact optical profiler. The gowning area has room for storage for individual research groups.

In 2020, the cleanroom expansion project effectively doubles the existing cleanroom facilities, adding by a further 1200 ft2 of dry lab and wet lab. The expanded space has enabled the installation of a new electron beam evaporator and reactive ion etcher, both of which bring state-of-the-art nanofabrication capabilities to West Campus.

Alongside existing materials characterization technologies, users from the Energy Sciences Institute, Systems Biology Institute, Nanobiology Institute, and across Yale can now complete device manufacturing at West Campus. The facility also provides an additional venue for researchers from applied physics, electrical engineering, and materials science, further supporting collaborations and the rapid development of nanoscale science, engineering, and technology at Yale.

Additionally, the cleanroom was built to support activity that is physically disconnected from the primary research complex so the non-laboratory spaces include a conference room with shared workstations, a staff office, a break room, lockers, and restrooms.

Laboratory floor plan
 

Available to Yale researchers & external researchers

Core website

Join the cleanroom

Please follow the instructions provided in the following link to access the cleanroom and research equipment.

Become a user

Rates

Internal usage rates
EquipmentUsage rate ($/hr)
Cleanroom56
Suss MJB4 mask aligner0
Zygo Nexview profiler0
Spin coater0
Autoglow etcher0
UHV electron beam evaporator0
Oxford PlasmaPro 100 reactive ion etcher0

SU8 photoresists are $15/device for internal and non-profit users, $30/device for external for-profit users.

For metals of electron beam evaporator, gold (Au) is charged by the thickness at $1.4/nm. All other metals (Ag, Ti, Cr, Al, Ni) are free to use.

Equipment fee is covered by Cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.

External users, please contact us directly for the rates.

Equipment & access policies

Equipment policies

Precious metals

Purchase of precious metals (e.g., gold, platinum, and palladium) is the responsibility of the research group. It is not supplied by the cleanroom.

Soft cap policy

Starting FY24, the Cleanroom policy has been updated. Groups will receive an 80% discount once the group usage fee exceeds $50,000 for the Cleanroom and $20,000 for YINQE. These caps are separate, and the discounts are applied individually for each facility. The usage fee calculation will reset at the beginning of each fiscal year.

Starting FY24:

Only group soft caps will apply.
Cleanroom group cap: $50,000.
YINQE group cap: $20,000.
An 80% discount will be applied above each cap.
The usage fee calculation resets at the beginning of each fiscal year.

Before FY24:

Individual cap: $10,000.
Group cap: $100,000.
Joint YINQE/Cleanroom discount applied.
An 80% discount was applied above the cap.
The usage fee was calculated from the first use.

Operating expenses for the cleanroom are recovered through the combination of hourly charges to the user community and subsidies from Yale University. All access is tracked through the Facility Online Manager (FOM) (requires Yale network access).

Access and use policies

A detailed list of policies is included in the Cleanroom User Handbook.

New chemicals

Any user wishing to introduce chemicals to the cleanroom must first present an SDS to a staff member for evaluation and display an active knowledge of the chemical hazards. Approved chemicals may be brought into the cleanroom by staff members only.

Visitor access

Anyone not qualified to enter the cleanroom is considered a visitor. Upon the approval of cleanroom staff, a qualified cleanroom user may act as a host to bring a visitor in for the purpose of observation only.

After hours

The cleanroom operates Monday through Friday, 8 AM to 5 PM. All other times are considered after hours and are restricted to users with over thirty hours of Cleanroom time logged with no safety incidents.

External customers

An external customer is any non-Yale researcher who has obtained the approval of the School of Engineering & Applied Science Business Office.

Undergraduates

Undergraduate access is granted on a case-by-case basis and must be under the supervision of a senior researcher or instructor when working in the Cleanroom.

Discipline

Instances of user misconduct are evaluated and dealt with on a case-by-case basis. Consequences range from a warning and notice delivered to your PI, to permanent suspension of cleanroom access.

Acknowledgments & publications

Acknowledging the core

For publications, recognition of support from the West Campus Cleanroom as well as individual staff contributions may be formatted as follows:

  • Acknowledgment: This work was made possible by the West Campus Cleanroom, a core facility supported by the Provost Office of Yale University.
  • We’d like to thank [staff member] for [service or other contribution].

Please also specify instrument models as follows:

  • SUSS MJB4 Mask Aligner
  • Zygo Nexview 3D Optical Profiler
  • Oxford PlasmaPro 100 Reactive Ion Etcher
  • PVD Products Electron Beam Evaporator

To share a publication on the cleanroom webpage, provide a copy to Yeongjae Shin.

Publications

1. Prashanta Kharel, Yiwen Chu, Michael Power, William H. Renninger, Robert J. Schoelkopf, and Peter T. Rakich. Ultra-high-Q phononic resonators on-chip at cryogenic temperatures. APL PHOTONICS 3, 066101 (2018). https://doi.org/10.1063/1.5026798

2. Yiwen Chu, Prashanta Kharel, Taekwan Yoon, Luigi Frunzio, Peter T. Rakich, and Robert J. Schoelkopf. Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator. Nature 563, 666-670 (2018)

3. Zhiliang Bai, Yanxiang Deng, Dongjoo Kim, Zhuo Chen, Yang Xiao, and Rong Fan. An Integrated Dielectrophoresis-Trapping and Nanowell Transfer Approach to Enable Double-Sub-Poisson Single-Cell RNA Sequencing. ACS Nano (2020). https://doi.org/10.1021/acsnano.0c02953

4. J. V. Pondick, S. Yazdani, M. Yarali, S. N. Reed, D. J. Hynek, J. J. Cha. The effect of mechanical strain on lithium staging in graphene Advanced Electronic Materials doi:10.1002/aelm.202000981 (2021)

5. Liu, S., Shah, D.S. and Kramer-Bottiglio, R. Highly stretchable multilayer electronic circuits using biphasic gallium-indium. Nat. Mater. (2021). https://doi.org/10.1038/s41563-021-00921-8

6. Bai Z, Lundh S, Kim D, et al. Single-cell multiomics dissection of basal and antigen-specific activation states of CD19-targeted CAR T cells. Journal for Immuno Therapy of Cancer (2021); 9:e002328. doi: 10.1136/jitc-2020-002328

7. Bai Z, Woodhouse S, Zhao Z, Arya R, Govek K, Kim D, Lundh S, Baysoy A, Sun H, Deng Y, Xiao Y, Barrett DM, Myers RM, Grupp SA, June CH, Fan R, Camara PG, Melenhorst JJ. Single-cell antigen-specific landscape of CAR T infusion product identifies determinants of CD19-positive relapse in patients with ALL. Sci Adv. (2022) Jun 10; 8(23).

8. Naijun Jin, Charles A. McLemore, David Mason, James P. Hendrie, Yizhi Luo, Megan L. Kelleher, Prashanta Kharel, Franklyn Quinlan, Scott A. Diddams, and Peter T. Rakich, “Micro-fabricated mirrors with finesse exceeding one million,” Optica 9, 965-970 (2022)

9. Neu J, Shipps CC, Guberman-Pfeffer MJ, Shen C, Srikanth V, Spies JA, Kirchhofer ND, Yalcin SE, Brudvig GW, Batista VS, Malvankar NS. Microbial biofilms as living photoconductors due to ultrafast electron transfer in cytochrome OmcS nanowires. Nat Commun. 2022 Sep 7;13(1):5150.

Contacts

100 Cleanroom Core Facility
750 West Campus Dr
West Haven, CT 06516

203-737-6796

203-737-2444 (wireless)

Cleanroom_Lauren McCabe

Primary contact

Lauren McCabe, PhD Assistant Director

Faculty Director

Andre Levchenko, EngScD John C. Malone Professor of Biomedical Engineering