West Campus Cleanroom
The cleanroom includes 1200 square feet of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.
Building 750 (Shipping & Receiving Center), with direct dedicated access along the southern exterior face of the building.
![Wet lab fume hoods](/sites/default/files/styles/1017x678/public/2024-03/West%20Campus%20Cleanroom%20hero_0.png?h=81afd789&itok=VrJnebDd)
About the core
The wet bay has three process hoods for acid, base, and resist applications. They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators.
The dry bay houses analysis instrumentation and photolithography tools, including a high-resolution UV mask aligner and a non-contact optical profiler. The gowning area includes storage room for individual research groups.
In 2020, the cleanroom installed a new electron beam evaporator and reactive ion etcher.
Equipment
- Process benches
- Photoresist process bench
- Acid and base process bench
- Solvent process bench
- SUSS UV mask aligner
- UHV electron beam evaporator
- Reactive ion etcher
- Zygo 3D Optical Profiler
- Glow Research AutoGlow 200 etcher
- Westar Resist spin coater
- Olympus optical microscope
- Celestron stereo microscope
- Programmable hotplate
- Regular hotplate
- Ovens
- Refrigerator
- Secador desiccator
Contacts
100 Cleanroom Core Facility
750 West Campus Dr
West Haven, CT 06516
203-737-6796
203-737-2444 (wireless)