Listing of research core items
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Instrument/equipment
Back-end processing
The cleanroom offers tools for the back-end processing of device fabrication, including a critical-point dryer and scribing and dicing tools, as well as lapping and polishing tools.
Located within Yale University Cleanroom -
Core/facility
Chemical and Biophysical Instrumentation Center (CBIC)
The Chemical and Biophysical Instrumentation Center (CBIC) offers NMR spectroscopy, X-ray crystallography, mass spectrometry, and other instruments to characterize and structurally elucidate chemical and biophysical samples.
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Instrument/equipment
Chemical vapor deposition
The chemical vapor deposition (CVD) tools can deposit metal, oxide, and nitride thin films. The cleanroom offers various CVD tools, including plasma-enhanced CVD and atomic layer deposition.
Located within Yale University Cleanroom -
Core/facility
Yale University Cleanroom - West Campus
The cleanroom at West Campus includes 1200 square feet of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.
Lauren McCabe, PhD
Primary contact Assistant Director, Cleanroom -
Instrument/equipment
Dry and plasma etching
Oxford 100 RIE-ICP and Glow Research AutoGlow
Located within Yale University Cleanroom - West Campus -
Core/facility
Earth Materials Characterization Center (EMC2)
We offer materials physics equipment including microscopy, spectroscopy, deformation tools, and sample-prep tools for sample characterization work.
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Services
Elemental abundance
Services for measuring the abundance of elements in a sample
Located within Yale Analytical and Stable Isotope Center (YASIC) -
Instrument/equipment
Dry and plasma etching
Dry and plasma etching tools provide the capability to etch metals, semiconductors, and organic films at controllable rates with high selectivity.
Located within Yale University Cleanroom -
Services
Gas chromatography
Measure greenhouse gas concentrations.
Located within Yale Analytical and Stable Isotope Center (YASIC) -
Instrument/equipment
Ion mill
The Hitachi IM4000 can be used for cross-sectioning samples (usually for SEM viewing) or for polishing surfaces.
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Instrument/equipment
Iridium sputtering tool
Iridium is useful for coating samples before electron microscopy.
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Services
Isotope ratio mass spectrometry (IRMS)
Isotope ratio mass spectrometry (IRMS) services
Located within Yale Analytical and Stable Isotope Center (YASIC)