Listing of research core items
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Core/facility
CBIC
The Chemical and Biophysical Instrumentation Center (CBIC) offers NMR spectroscopy, X-ray crystallography, mass spectrometry, and other instruments to characterize and structurally elucidate chemical and biophysical samples.
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Instrument/equipment
Chemical vapor deposition
The chemical vapor deposition (CVD) tools can deposit metal, oxide, and nitride thin films. The cleanroom offers various CVD tools, including plasma-enhanced CVD and atomic layer deposition.
Located within Yale University Cleanroom -
Core/facility
West Campus Cleanroom
The cleanroom includes 1200 square feet of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.
Lauren McCabe, PhD
Primary contact Assistant Director, Cleanroom -
Instrument/equipment
Dry and plasma etching
Oxford 100 RIE-ICP and Glow Research AutoGlow
Located within West Campus Cleanroom -
Core/facility
Earth Materials Characterization Center (EMC2)
We offer materials physics equipment including microscopy, spectroscopy, deformation tools, and sample-prep tools for sample characterization work.
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Instrument/equipment
Dry and plasma etching
Dry and plasma etching tools provide the capability to etch metals, semiconductors, and organic films at controllable rates with high selectivity.
Located within Yale University Cleanroom -
Instrument/equipment
Ion mill
The Hitachi IM4000 can be used for cross-sectioning samples (usually for SEM viewing) or for polishing surfaces.
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Instrument/equipment
Iridium sputtering tool
Iridium is useful for coating samples before electron microscopy.
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Instrument/equipment
Lithography
The cleanroom offers tools that provide a comprehensive solution for photolithography.
Located within Yale University Cleanroom -
Instrument/equipment
Metrology
Zygo 3D Optical Profiler, Olympus Optical Microscope, and Celestron Stereo Microscope
Located within West Campus Cleanroom -
Instrument/equipment
Metrology
Metrology tools offer the ability to characterize thin films, including via an optical microscope, spectral reflectometry, ellipsometry, stylus profiler, and optical profilometer.
Located within Yale University CleanroomYeongjae Shin
Staff Scientist -
Instrument/equipment
Microtome
A microtome makes possible the sectioning of soft material for TEM analysis.