Iridium sputtering tool

Sungwoo Sohn, PhD

Associate Director of Facilities

About the instrument

Scientific instrument
Cressington 208 iridium sputtering tool

Iridium is useful for coating samples before electron microscopy. The Cressington 208 iridium sputtering tool provides very smooth, conformal coatings which are free of the grain structure found in films of Au or Au-Pd. Chromium would also be a good choice for coating SEM samples, but iridium oxidizes much more slowly, and so it has an advantage over fine-grained chromium films. 

A sputter coater for gold is located next to the chromium system. Gold is used for coating electron-beam resist before lithography, but it is not a good choice for SEM samples.

Available to Yale researchers & external researchers