SC 28 Site Monitoring Tool

Advanced instruments require a good lab environment to operate at the best performance. However, sometimes the lab space simply does not satisfy the requirements. This situation has been carefully taken care of since the establishment of the new ACEM Core at Yale University. A professional site monitoring toolkit was purchased to monitor the lab environment in the ACEM Spectra Ultra microscope room. However, it is available for Yale researchers or collaborators to use to evaluate their own labs.

The SC28 monitoring system enables long-term, uninterrupted measurements of magnetic fields, vibrations, acoustic noise, and temperature/humidity. This system is uniquely-designed to monitor the environment for electron beam instruments, including: Scanning Electron Microscopes (SEM), Transmission ElectronMicroscopes (TEM), Electron Beam Lithography tools, and SEM-based metrology and inspection tools.

The SC28 utilizes high-performance sensors and monitoring hardware, delivering clear and comprehensive understanding of the environment being measured.
1) Monitoring System: SC28/SI
2) AC/DC Sensors: Sensor SC24/DC+AC and Sensor SC11/AC
3) Acoustic Microphone: Brüel & Kjær 4190 microphone
4) Vibration Sensors: Wilcoxon 731A accelerometers (three)
5) Temperature/Humidity Sensor: Sensor SC28/TH

Training is provided through workday learning at:
https://www.myworkday.com/yale/learning/course/90e9da2ed4331020501914bba7400000?type=9882927d138b100019b928e75843018d