Metrology
About the instruments
Zygo 3D Optical Profiler
The Nexview™ profiler represents a significant advantage over other metrology methods. A fully automated optical head makes configuration of advanced metrology applications easy, robust and repeatable. Interactive user-configurable data plots reveal surface characteristics through traditional 2D and 3D plots, as well as more advanced slope analysis, PSD, and true color imaging. Read more on optical profiling in Specifications.
- Excels at measuring all surfaces – from super-smooth to very rough, with sub-nanometer precision, independent of field of view.
- Measurement types include flatness, roughness, large steps and segments, thin films, and steep slopes, with feature heights ranging from < 1 nm up to 20000 µm.
- No-compromise profiling – for all types of surfaces, from rough to super smooth, including thin films, steep slopes, and large steps.
- Gage-capable performance – exceptional precision and repeatability for the most demanding production applications.
- Non-contact measurement, no damage to samples.
Olympus Optical Microscope
- 5x, 10x, 20x, 50x, and 100x bright/dark field objective
- The invisible becomes visible: MIX observation
- Create all-in-focus images: EFI
- Easily move the stage for panorama: Instant MIA
- Capture both bright and dark areas: HDR
- Adaptable to suit observational and analysis preferences
- Accommodates a wide range of samples
- Superior optical performance: wavefront aberration control
- Stable color temperature and high-intensity white LED illumination
- Support precise measurement: auto calibration
- Seamless stitching: image shading correction
Celestron Stereo Microscope
The Celestron Labs S10-60 is an all-metal-bodied, low-power stereo microscope with advanced features such as high-quality glass optics, 1x and 3x objectives, 10x and 20x eyepieces, and upper and lower illuminators.
- Professional-level stereo microscope up to 60x power
- Two sets of 10x and 20x eyepieces
- Two sets of objective lenses: 1x and 3x – in-rotating housing
- View specimens at 10x, 20x, 30x, and 60x magnification
- Full-metal construction with coarse focusing knob
- Upper and lower illumination for full range of viewing
- Two stage plates included: (1) transparent stage for bottom illumination and (1) black and white sides for enhanced viewing
Available to Yale researchers & external researchers
Specifications
More on the Zygo Nexview 3D Optical Profiler
An optical profiler is an interference microscope, and it measures height variations on surfaces with great precision using the wavelength of light as the ruler.
Optical profiling uses the wave properties of light to compare the optical path difference between a test surface and a reference surface. Inside an optical interference profiler, a light beam is split, reflecting half the beam from a test material passed through the focal plane of a microscope objective; the other half of the split beam is reflected from the reference mirror.
When the distance from the beam splitter to the reference mirror is the same distance as the beam splitter is from the test surface, the recombined two beams are in phase, resulting in constructive interference and hence a bright band. A dark band occurs due to destructive interference when the beam paths have the half-wavelength difference. These light and dark bands are known as interference fringes.
In the interference image (an “interferogram”), each transition from light to dark represents one-half a wavelength of difference between the reference path and the test path.
The reference mirror is as close to perfect flatness as possible; hence the optical path differences are due to height variances in the test surface. If the wavelength is known, it is possible to calculate height differences across a surface. A 3D surface map is obtained.