Wet benches

1. Process benches: photoresist, acid and base, solvent
2. Westar resist spin coater
3. Programmable hotplate
4. Regular hotplate

Process benches

Photoresist process bench

• Stainless steel construction with rear exhaust
• Two spin processors
• Multiple hot plates
• DI waterspray gun, nitrogen gun and vacuum ports
• Sink with DI water
• Ultrasonic tank with heating

Acid and base process bench 

• Polypropylene construction with rear exhaust
• DI waterspray gun, nitrogen gun and vacuum ports
• Sink with DI water Ultrasonic tank with heating

Solvent process bench

• Stainless construction with rear exhaust
• DI waterspray gun, nitrogen gun and vacuum ports
• Sink with DI water
• Ultrasonic tank with heating

Westar resist spin coater

• Fits wafers up to 6” or substrates up to 4” x 4”
• Programmable digital motor speed control, +/- 0.5% speed regulation, CW/CCW rotation and acceleration
• Easy process recipe creation and editing on or off the system
• Up to 999 steps per recipe, stores thousands of recipes on internal compact flash or external thumb drive
• Wear-compensating rotary vacuum seal
• Accepts vacuum or pin-style chucks
• Spring assisted latching lid with sensor interlock; motor stops if lid is opened while running
• Easily accessible, serviceable PTFE valve for vacuum chuck
• 6.5-inch color touchscreen HMI plus keypad
• Windows 7 embedded OS

Manufacturer product page

Programmable hotplate

• Temperature range: 0–400 °C
• Heating area: 6x6 inches
• Store up to 10 programs in memory for instant recall and use
• Heats up to maximum temperature in approximately 2 minutes
• Platinum RTD temperature measurement for ±1% accuracy
• Repeat any program up to 98 times automatically
• Multiple temperatures, temperature ramp rates, and timed events can be stored
• Includes timer to 99 hours, 59 minutes with auto-off option
• Unit can be programmable or non-programmable in operation
• Offers RS-232 interface for control or recording data via a computer

Manufacturer product page

Regular hotplate

• Temperature range: 0 - 300 °C
• Heat to the maximum temperature in 5 minutes
• Heating area: 7.25 x 7.25 inch
• Temperature stability of ±1.8°F (1°C)
• Program and save temperature and time settings for your most common applications