Downloads
| Name | System | Description | Download link |
|---|---|---|---|
| EBPG Fun Pak | EBPG, Linux | All sorts of EBPG goodies, including weekly_check, gpfsort, gpfmerge, calc.py, align_window, find_edge, find_square, set_current, and more. NEW: perfcheck summary program, cjob installation scripts, utilities for setting high beam currents, dose_matrix program for creation of dose tests. Check out the presentation on drift and sorting for examples of gpfsort in action. Gpfsort and ybrsort can now sort fields by a specified path. Correlate.py provides a well-documented method for using correlation alignment. | Fun pak |
| Flatten GDS v3.13 | Linux, generic | Flatten GDSII pattern files, removing hierarchy and rendering rotations, scaling, etc, as simple polygons. Rotated, scaled, and mirrored cells are now handled properly. A python script for flattening with Layout is included, for pathological cases. | Flatten3.13 |
| GDS Dump | Linux, generic | Print contents of a GDSII pattern file as text, which is useful for debugging CAD problems. | GDS Dump |
| GDS Library | Linux, generic | A library of C functions for reading and writing GDSII pattern format. Example included. | GDSLib |
| Bruker AFM Analysis | Windows | Bruker’s AFM NanoScope Analysis, for Yale AFM users only. Email Sungwoo Sohn for the link. Others, please contact Bruker directly. | NanoScope Analysis 1.9 |
| Freebeam - convert patterns to EBPG format | Linux | Freebeam: Pattern fracturing and conversion to GPF for EBPG systems. The download includes all source code for Linux systems. Easiest installation is on an EBPG console. | Download at Github |
Installation
To unpack downloaded files that end in “.tar” use the command
tar xvf filename.tar
To unpack downloaded files that end in “.tar.gz” or “.tgz” use the command
tar xvzf filename.tar.gz
To unpack files that end in “.zip”… If you need help with this then you really should not be attempting e-beam lithography. Go home and take a nap.
Look in the file INSTALL or install.txt for further instructions.
These programs are open-source and are dependent on other open-source code. They will run on nearly any distribution of GNU/Linux and are distributed here under the GNU general public license.