Ultra high-resolution SEM
Hitachi SU7000 ultra high-resolution scanning electron microscope (SEM)
Versatile imaging capability
The SU7000 excels in fast acquisition of multiple signals to address expansive SEM needs, from imaging a wide field of view to visualizing sub‐nanometer structures and everything in between. The incorporation of newly designed electron optics and detection systems allows for efficient simultaneous acquisition of multiple secondary electron and back‐scattered electron signals. The SU7000 is capable of processing, displaying, and saving up to signals from 5 detectors (two SE, two BSE and one CL detector) simultaneously to maximize information acquisition.
Variable pressure SEM mode (VP‐SEM)
Under VP SEM mode with the chamber pressure at the range of 5‐300 Pascal, the SU7000 is capable to image dry and non-conductive samples without conductive coating.
Enhanced information acquisition
The advanced detection system of the SU7000 streamlines acquisition of structural, topographical, compositional, crystallographic, and other types of information by minimizing changes to microscope conditions.
Microanalysis
The electron gun is equipped with a Schottky emitter that provides up to 200 nA beam current to accommodate various microanalysis applications. The specimen chamber and port layout are designed to incorporate multiple analytical options including energy dispersive spectrometry (EDS), electron backscatter diffraction (EBSD), and cathodoluminescence. The SU7000 is attached with all three of these systems.
Available to Yale researchers & external researchers
EDS
Energy dispersive spectrometry (EDS) system
Oxford Instruments Ultim Max100 SDD detectors benefit from bigger sensor sizes and faster electronics, which deliver users twice the sensitivity and up to four times the speed of the best current generation SDDs.
Paired with Oxford Instruments' unique AZtecLive real-time EDS analysis software as standard, live sample navigation by chemistry in an electron microscope is possible for the first time.
This unique capability changes EDS from a traditional static approach to dynamic, interactive analysis. Not only does the solution offer live imaging, X-ray mapping and element identification, but the range of Ultim detectors makes even the most challenging analysis possible.
Offering the highest sensitivity for beam sensitive materials, light element, and nano-analysis, Ultim systems enable elemental characterization of a wider range of samples and smaller features than ever before in the SEM.
EBSD
The Oxford Instruments Symmetry is the world’s first CMOS-based electron backscatter diffraction (EBSD) detector. Symmetry represents a significant breakthrough compared to conventional CCD-based detectors: an unrivaled top acquisition speed in excess of 3000 indexed patterns per second (pps) is uniquely balanced by uncompromising sensitivity and data quality, providing up to an order of magnitude performance improvement on all samples.
Cathodoluminescence
The Gatan Monarc 450 Cathodoluminescence System dramatically boosts sensitivity and spectral resolution, empowering the most complete cathodoluminescence (CL) analysis to date, with unique wavelength- and angle-resolved capabilities. This true next-generation CL detector now provides brand-new insights into the most demanding applications in nanophotonics, optoelectronics, and geosciences.
- Acquire CL data with unmatched spatial (<10 nm), angular (1°), and wavelength (0.1 nm) resolutions.
- Simultaneously capture angle- and wavelength-resolved CL data
- Collect hyperspectral data up to 30 times faster than other CL
detectors