Yale University Cleanroom: Tool manager summary

Use this page to check the staff member assigned to each tool. You can use this link to request training for any tool.

Sputtering and evaporation

ToolOwnerBackup
Denton Infinity 22 E-Beam EvaporatorLauren McCabeYeongjae Shin
PVD E-Beam Evaporator-Main CampusLauren McCabeIda Sadeghi
PVD E-Beam Evaporator-West CampusLauren McCabeIda Sadeghi
Nano38 Thermal EvaporatorLauren McCabeYeongjae Shin
Kurt J. Lesker CMS-18 Sputtering SystemLauren McCabeLuigi Frunzio
Kurt J. Lesker PVD 75 Indium EvaporatorLuigi FrunzioIda Sadeghi

Metrology

ToolOwnerBackup
Filmetrics F54-UV ReflectometerYeongjae ShinLauren McCabe
Woollam M-2000 EllipsometerYeongjae ShinLauren McCabe
KLA P-7 Stylus Profiler-1Yeongjae ShinLauren McCabe
KLA P-7 Stylus Profiler-2Yeongjae ShinIda Sadeghi
Bruker ContourX-500 3D Optical ProfilerYeongjae ShinLauren McCabe
Zygo Nexview 3D Optical ProfilerYeongjae ShinIda Sadeghi
Zeta-20 Optical MicroscopeYeongjae ShinLauren McCabe
Olympus BX53MRF Optical MicroscopeYeongjae Shin 
Celestron S10-60 Stereo MicroscopeYeongjae Shin 

Lithography

ToolOwnerBackup
Heidelberg MLA150 Maskless AlignerYong SunIda Sadeghi
Heidelberg μMLA Maskless AlignerYong SunLauren McCabe
Suss MJB4 Mask Aligner-Main CampusYong SunIda Sadeghi
Suss MJB4 Mask Aligner-West CampusYong SunIda Sadeghi
Heidelberg MPO100 3D Lithography SystemYong Sun 
Laurell SpinnersIda SadeghiYong Sun
YES HMDS Prime OvensIda SadeghiYong Sun

Dry and plasma etching

ToolOwnerBackup
Oxford 100 RIE-ICP-Main CampusYong SunLauren McCabe
Oxford 100 RIE-ICP-West CampusYong SunIda Sadeghi
Oxford 80+ ICP RIEYong SunLauren McCabe
Oxford Cryo Bosch DRIEYong SunLauren McCabe
AutoGlow 200 Etcher-1Lauren McCabeYong Sun
AutoGlow 200 Etcher-2Lauren McCabeIda Sadeghi
XactiX XeF2 Silicon EtcherYong Sun 

Chemical vapor deposition

ToolOwnerBackup
Fiji Plasma ALDLauren McCabeYong Sun
SAMCO PD-220NL PECVDYong SunLauren McCabe
Tystar MiniTytan 4600 LPCVD FurnaceYeongjae ShinIda Sadeghi
SSI Solaris RTAYong Sun 

Back-end processing

ToolOwnerBackup
HESSE Bondjet BJ855 Wire BonderLuigi FrunzioIda Sadeghi
ADT 7122 Dicing SawLuigi FrunzioIda Sadeghi
Ontos 7 Indium Surface Treatment SystemLuigi FrunzioIda Sadeghi
SETNA FC150 Flip Chip BonderLuigi FrunzioIda Sadeghi
Tousimis Critical Point DryerYeongjae ShinYong Sun
LatticeGear Scribing ToolsYeongjae ShinIda Sadeghi