Yale University Cleanroom
The University Cleanroom provides a controlled environment that maintains intentionally low concentrations of pollutants to allow for uncontaminated scientific research.
Join the cleanroom
Please follow the instructions provided in the following link to access the cleanroom and research equipment.
Become a memberAbout the cleanroom
The University Cleanroom is a core science facility administered by the Department of Applied Physics. It is a particle-free environment for the design, fabrication, and testing of micro- and nanofabricated devices.
Research infrastructure
Yale University's Cleanroom is a pivotal facility for advanced research, equipped with more than 30 specialized tools. These tools are supported by a knowledgeable staff who ensure their maintenance and provide comprehensive training. The facility is designed to support a wide range of research fields including nano-fabrication, materials science, biomedical engineering, quantum computing, chemical and environmental engineering, and applied physics, making it an essential environment for cutting-edge investigations.
The cleanroom's equipment and processes are organized into seven main categories: sputtering and evaporation, chemical vapor deposition, etching, lithography, metrology, back-end processing, and wet benches, along with a teaching cleanroom specifically for instructional purposes. This structured approach ensures that researchers have access to the necessary tools and support to advance their work.
Acknowledging the cleanroom
For publications, recognition of support from the Yale University Cleanroom, as well as individual staff contributions may be formatted as follows:
- Acknowledgement: This work was made possible by the Yale University Cleanroom, a core facility supported by the Provost Office of Yale University.
- We’d like to thank [staff member] for [service or other contribution].
To share a publication on the cleanroom webpage, provide a copy to Yeongjae Shin.
Contacts
Becton Engineering and Applied Science Center
15 Prospect Street
New Haven, CT 06511
Primary contact
Facility Manager
Staff Scientist
Staff Scientist
Faculty Director
Rates
Equipment policies and rates
Precious metals
Purchase of precious metals (e.g., gold, platinum, and palladium) is the responsibility of the research group. It is not supplied by the cleanroom.
Soft cap policy
Users and groups will receive an 80% discount after the group usage fee exceeds $100,000, or an 80% discount after individual usage fee exceeds $15,000. The usage fee is calculated by combining the fee charged by both the University Cleanroom & YINQE user fees and equipment rates.
Operating expenses for the cleanroom are recovered through the combination of hourly charges to the user community and subsidies from Yale University. All access is tracked through the Facility Online Manager (FOM) (requires Yale network access).
Main Cleanroom access fee | $58 / hour |
Teaching Cleanroom access fee | $58 / hour |
Staff service fee | $75 / hour |
Oxford 80+ ICP RIE | $64 / hour |
Oxford 100 ICP-RIE | $64 / hour |
Oxford Cryo Bosch DRIE | $64 / hour |
Simple PhotoMask | $275 / order |
Complex PhotoMask | $400 / order |
Access and use policies
A detailed list of policies is included in the Cleanroom User Handbook.
New chemicals
Visitor access
After hours
External customers
Undergraduates
Discipline