West Campus Cleanroom
The cleanroom includes 1200 square feet of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.
Building 750 (Shipping & Receiving Center), with direct dedicated access along the southern exterior face of the building.
About the core
The wet bay has three process hoods for acid, base, and resist applications. They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators.
The dry bay houses analysis instrumentation and photolithography tools, including a high-resolution UV mask aligner and a non-contact optical profiler. The gowning area includes storage room for individual research groups.
In 2020, the cleanroom installed a new electron beam evaporator and reactive ion etcher.
Equipment
- Process benches
- Photoresist process bench
- Acid and base process bench
- Solvent process bench
- SUSS UV mask aligner
- UHV electron beam evaporator
- Reactive ion etcher
- Zygo 3D Optical Profiler
- Glow Research AutoGlow 200 etcher
- Westar Resist spin coater
- Olympus optical microscope
- Celestron stereo microscope
- Programmable hotplate
- Regular hotplate
- Ovens
- Refrigerator
- Secador desiccator
Contacts
100 Cleanroom Core Facility
750 West Campus Dr
West Haven, CT 06516
203-737-6796
203-737-2444 (wireless)
Primary contact
Director
Faculty Director
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Core/Facility
Aberration-Corrected Electron Microscopy (ACEM) Core
Our core's focus is cutting-edge and high-throughput capability in electron microscopy techniques, including TEM, SEM, and FIB.
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Core/Facility
Advanced Prototyping Center at Wright Lab
The Advanced Prototyping Center is a fabrication and design support facility to help Yale researchers with custom instrumentation.
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Core/Facility
Yale Analytical and Stable Isotope Center (YASIC)
Our analytical services include measurements of stable and radiocarbon isotopes, cations, anions, greenhouse gases, natural γ-radiation, mercury, and nutrients in water or soil extracts.